- Overview
- Product Description
- Company Profile
- Packaging & Shipping
- FAQ
Basic Info.
Model NO.
High Purity Gas Diffuser - DF series
Filter Material
316L Stainless Steel Powder Sintered
Housing Material
316L Stainless Steel
Particle Interception Size
≥ 0.003μm
Maximum Inlet Pressure
4 Bar
Maximum Operating Differential Pressure
5 Bar
Maximum Operating Temperature
400ºC
Transport Package
Boxs
Trademark
HENGKO
Origin
Shenzhen, China
Product Description
Superior Filtration and Reliable High-Pressure Flow Control
for Semiconductor Processes
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The Diffuser Filter is a cutting-edge solution specifically designed for rapid venting applications in vacuum chambers used in semiconductor manufacturing processes.
Click the link to get the catalogue!
Size
Product Information Table for Disc filter type
Product Information Table for Cartridge filter type
The Diffuser Filter is a cutting-edge solution specifically designed for rapid venting applications in vacuum chambers used in semiconductor manufacturing processes.
Combining the flow characteristics of a diffuser with the particle interception capabilities of a high-efficiency filter,this product ensures unmatched performance and reliability.
Key Features
Ultra-High Filtration Precision:
Ultra-High Filtration Precision:
Achieves filtration accuracy of up to 0.003μm, effectively capturing even the smallest particles to protect sensitive semiconductor environments.
Innovative 316L Stainless Steel Construction:
Crafted entirely from 316L stainless steel, this unique design ensures exceptional durability, corrosion resistance, and superior filtration efficiency.
Crafted entirely from 316L stainless steel, this unique design ensures exceptional durability, corrosion resistance, and superior filtration efficiency.
Turbulence-Free Design:
Engineered to minimize turbulence, preventing any disturbance to the process chamber environment.
This feature safeguards against particle resuspension or wafer surface contamination, maintaining the integrity of the production process.
Engineered to minimize turbulence, preventing any disturbance to the process chamber environment.
This feature safeguards against particle resuspension or wafer surface contamination, maintaining the integrity of the production process.
Customizable and Flexible:
Tailored to fit various installation spaces, the filter adapts seamlessly to diverse system requirements,providing a versatile solution for semiconductor manufacturing needs.
Tailored to fit various installation spaces, the filter adapts seamlessly to diverse system requirements,providing a versatile solution for semiconductor manufacturing needs.
Click the link to get the catalogue!
Product Feature
☆Sintered Stainless Steel Media for Rapid Venting
Datasheet
☆Full 316L Stainless Steel Construction
☆Reduces Turbulence During Chamber Exhaust
☆Compatible with a Wide Range of Process Gases
☆Manufactured, Tested, and Packaged in Cleanroom Environments
☆100% Integrity Testing
☆100% Helium Leak Detection Passed
☆High-Temperature, High-Pressure, and Corrosion Resistant
☆Prevents Particle Contamination
☆Customizable Design
☆Reduces Turbulence During Chamber Exhaust
☆Compatible with a Wide Range of Process Gases
☆Manufactured, Tested, and Packaged in Cleanroom Environments
☆100% Integrity Testing
☆100% Helium Leak Detection Passed
☆High-Temperature, High-Pressure, and Corrosion Resistant
☆Prevents Particle Contamination
☆Customizable Design
Datasheet
| Parameter | Specification | Parameter | Specification |
| Filter Material | 316L Sintered Stainless Steel | Housing Material | 316L Stainless Steel |
| Surface Treatment | Inner Surface: Ra ≤ 32μm | Filtration Accuracy | ≥ 0.003μm |
| Maximum Inlet Pressure | 4 bar | Maximum Operating Differential Pressure | 5 bar |
| Maximum Operating Temperature | 400ºC | Downstream Cleanliness | ≤ 0.03 particles/liter @ >0.01μm rated flow |
Size
Product Information Table for Disc filter type
| Product Model | Inlet Specification | Outlet Specification | Total Length (A) | Filter Element OD (φB) | Housing OD (φC) |
| Z01B-00639 | 1/4'' VCR | ISO NW40 Vacuum Flange | 42mm (1.64'') | Φ39mm (1.53'') | Φ55mm (2.16'') |
| Z01B-00695 | 1/4'' VCR | ISO NW50 Vacuum Flange | 42mm (1.64'') | Φ52mm (2.05'') | Φ75mm (2.95'') |
Product Information Table for Cartridge filter type
| Product Model | Inlet Specification | Outlet Specification | Total Length (A) | Filter Element OD (φB) | Housing OD (φC) | Filter Tube Length (D) |
| Z01B-00697 | 1/4'' VCR | ISO NW16 Vacuum Flange | 81mm (3.18'') | Φ16mm (0.64'') | Φ30mm (1.18'') | 44mm (1.74'') |
| Z01B-00501 | 1/4'' VCR | ISO NW16 Vacuum Flange | 104mm (4.08'') | Φ16mm (0.64'') | Φ30mm (1.18'') | 67mm (2.64'') |
| Z01B-00698 | 1/4'' VCR | ISO NW16 Vacuum Flange | 135mm (5.30'') | Φ16mm (0.64'') | Φ30mm (1.18'') | 98mm (3.86'') |
| Z01B-00699 | 1/4'' VCR | ISO NW25 Vacuum Flange | 81mm (3.18'') | Φ16mm (0.64'') | Φ40mm (1.58'') | 44mm (1.74'') |
| Z01B-00700 | 1/4'' VCR | ISO NW25 Vacuum Flange | 104mm (4.08'') | Φ16mm (0.64'') | Φ40mm (1.58'') | 67mm (2.64'') |
| Z01B-00701 | 1/4'' VCR | ISO NW40 Vacuum Flange | 104mm (4.08'') | Φ16mm (0.64'') | Φ55mm (2.16'') | 67mm (2.64'') |
Typical Applications
☆Vacuum chambers requiring rapid and precise gas venting.
☆Vacuum chambers requiring rapid and precise gas venting.
☆High-sensitivity semiconductor manufacturing environments.
☆Processes where turbulence minimization and particle control are critical.
With its advanced design and outstanding performance, the Diffuser Filter is the perfect choice foroptimizing filtration and flow control in semiconductor applications.
☆Processes where turbulence minimization and particle control are critical.
With its advanced design and outstanding performance, the Diffuser Filter is the perfect choice foroptimizing filtration and flow control in semiconductor applications.
☆Filters high-pressure gases for cooling and process applications, especially in high-temperature settings.
☆Enhances efficiency and reduces equipment wear by preventing contamination in gas cooling and flow systems.
These filters are essential in any application requiring clean, consistent gas flow, enhancing equipment protection,process efficiency, and final product quality across industries.
☆Enhances efficiency and reduces equipment wear by preventing contamination in gas cooling and flow systems.
These filters are essential in any application requiring clean, consistent gas flow, enhancing equipment protection,process efficiency, and final product quality across industries.
HENGKO Technology Co., Ltd., established in 2001, is professional manufacturer engaged in the research, development, production, sale and service of temperature and humidity devices and porous metal products. Our product range includes sintered metal filter, temperature and humidity sensor, temperature and humidity controller, dew point sensor, data logger, air diffuser and sensor housing. Dedicated to strict quality control and thoughtful customer service, our experienced staff members are always available to discuss customers' requirements and ensure full customer satisfaction. We look forward to forming a stable and extensive strategic partnership with friends from all walks of life and create a better future together.
Q1. Are you manufacturer or trading company?
--We are direct manufacturer specializing in porous sintered metal filters.
Q2. What's the delivery time ?
--Normal model 7-10 work days because we have ability to do the stock. For big order, it takes about 10-15 work days.
Q3. What is your MOQ?
-- Usually, it is 100PCS, but if we have other orders together, can help you with small QTY also.
Q4. What payment ways available?
-- Western Union, Paypal , T/T , Credit Card , online bank transfer, RMB , etc.
Q5. If sample first possible?
-- Sure, usually we have certain QTY of free samples, if not, we'll charge accordingly.
Q6. We have design, can you produce?
--Yes, welcome!
Q7. Which market do you already sell?
--We already ship to Europe, Middle East, Asia, South America , Afria, North America etc
Q2. What's the delivery time ?
--Normal model 7-10 work days because we have ability to do the stock. For big order, it takes about 10-15 work days.
Q3. What is your MOQ?
-- Usually, it is 100PCS, but if we have other orders together, can help you with small QTY also.
Q4. What payment ways available?
-- Western Union, Paypal , T/T , Credit Card , online bank transfer, RMB , etc.
Q5. If sample first possible?
-- Sure, usually we have certain QTY of free samples, if not, we'll charge accordingly.
Q6. We have design, can you produce?
--Yes, welcome!
Q7. Which market do you already sell?
--We already ship to Europe, Middle East, Asia, South America , Afria, North America etc